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NIST · ИТ · 054251009a531080fb37

054251009a531080fb37 · In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition

In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition

This report describes the performance of a technique for the simultaneous, rapid measurement of major gas phase species present during titanium nitride thermal atomic layer deposition involving tetrakis(dimethylamido) titanium (TDMAT) and ammonia. In this

Официальный источник · 2011-10-14

Полные импортированные сведения карточки
{
  "title_en": "In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2011-10-14",
  "date_original": "October 14, 2011",
  "url": "https://www.nist.gov/publications/situ-gas-phase-diagnostics-titanium-nitride-atomic-layer-deposition",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James E. Maslar , William A. Kimes , Brent A. Sperling",
  "abstract_excerpt_en": "This report describes the performance of a technique for the simultaneous, rapid measurement of major gas phase species present during titanium nitride thermal atomic layer deposition involving tetrakis(dimethylamido) titanium (TDMAT) and ammonia. In this",
  "id": "054251009a531080fb37",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2011-10-14",
      "date_original": "October 14, 2011",
      "url": "https://www.nist.gov/publications/situ-gas-phase-diagnostics-titanium-nitride-atomic-layer-deposition",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James E. Maslar , William A. Kimes , Brent A. Sperling",
      "abstract_excerpt_en": "This report describes the performance of a technique for the simultaneous, rapid measurement of major gas phase species present during titanium nitride thermal atomic layer deposition involving tetrakis(dimethylamido) titanium (TDMAT) and ammonia. In this"
    }
  ],
  "translation_state": "none"
}