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NIST · ИТ · 08206aee7d322ecc6ee5

08206aee7d322ecc6ee5 · Electron Interactions with Plasma Processing Gases: An Update for CF 4 , CHF 3 , C 2 F 6 and C 3 F 8

Electron Interactions with Plasma Processing Gases: An Update for CF 4 , CHF 3 , C 2 F 6 and C 3 F 8

An update of electron-collision cross sections and electron transport parameters is presented for CF 4, CHF 3, C 2F 6, and C 3F 8.

Официальный источник · 1999-12-01

Полные импортированные сведения карточки
{
  "title_en": "Electron Interactions with Plasma Processing Gases: An Update for CF 4 , CHF 3 , C 2 F 6 and C 3 F 8",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1999-12-01",
  "date_original": "December 1, 1999",
  "url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases-update-cf4-chf3-c2f6-and-c3f8",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Loucas G. Christophorou, James K. Olthoff",
  "abstract_excerpt_en": "An update of electron-collision cross sections and electron transport parameters is presented for CF 4, CHF 3, C 2F 6, and C 3F 8.",
  "id": "08206aee7d322ecc6ee5",
  "sources": [
    "NIST Publications"
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  "source_records": [
    {
      "title_en": "Electron Interactions with Plasma Processing Gases: An Update for CF 4 , CHF 3 , C 2 F 6 and C 3 F 8",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1999-12-01",
      "date_original": "December 1, 1999",
      "url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases-update-cf4-chf3-c2f6-and-c3f8",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Loucas G. Christophorou, James K. Olthoff",
      "abstract_excerpt_en": "An update of electron-collision cross sections and electron transport parameters is presented for CF 4, CHF 3, C 2F 6, and C 3F 8."
    }
  ],
  "translation_state": "none"
}