08b2e486c0273b0aa82a · A Monolithic CMOS Microhotplate-based Gas Sensor System

{
  "title_en": "A Monolithic CMOS Microhotplate-based Gas Sensor System",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2002-12-01",
  "date_original": "December 1, 2002",
  "url": "https://www.nist.gov/publications/monolithic-cmos-microhotplate-based-gas-sensor-system",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Muhammad Afridi , John S. Suehle , Mona E. Zaghloul , David W. Berning , Allen R. Hefner Jr. , Richard E. Cavicchi , Stephen Semancik , C B. Montgomery, C J. Taylor",
  "abstract_excerpt_en": "A monolithic CMOS microhotplate-based conductance type gas sensor system is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time",
  "id": "08b2e486c0273b0aa82a",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "A Monolithic CMOS Microhotplate-based Gas Sensor System",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2002-12-01",
      "date_original": "December 1, 2002",
      "url": "https://www.nist.gov/publications/monolithic-cmos-microhotplate-based-gas-sensor-system",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Muhammad Afridi , John S. Suehle , Mona E. Zaghloul , David W. Berning , Allen R. Hefner Jr. , Richard E. Cavicchi , Stephen Semancik , C B. Montgomery, C J. Taylor",
      "abstract_excerpt_en": "A monolithic CMOS microhotplate-based conductance type gas sensor system is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the microhotplates include a one-millisecond thermal time"
    }
  ],
  "translation_state": "none"
}