0cf14f08cff3afbd38ee · Ion Kinetic-Energy Distributions in Argon rf Glow Discharges
Ion Kinetic-Energy Distributions in Argon rf Glow Discharges
NIST · ИТNIST · ИТ · 0cf14f08cff3afbd38ee
Ion Kinetic-Energy Distributions in Argon rf Glow Discharges
NIST · ИТОфициальный источник · 1992-11-01
{
"title_en": "Ion Kinetic-Energy Distributions in Argon rf Glow Discharges",
"designation": "",
"series": "",
"status": "",
"date": "1992-11-01",
"date_original": "November 1, 1992",
"url": "https://www.nist.gov/publications/ion-kinetic-energy-distributions-argon-rf-glow-discharges",
"source": "NIST Publications",
"display_en": "",
"authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov",
"abstract_excerpt_en": "",
"id": "0cf14f08cff3afbd38ee",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Ion Kinetic-Energy Distributions in Argon rf Glow Discharges",
"designation": "",
"series": "",
"status": "",
"date": "1992-11-01",
"date_original": "November 1, 1992",
"url": "https://www.nist.gov/publications/ion-kinetic-energy-distributions-argon-rf-glow-discharges",
"source": "NIST Publications",
"display_en": "",
"authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov",
"abstract_excerpt_en": ""
}
],
"translation_state": "none"
}