159e7dcb92473fca8a3c · Conductive Carbon Nanotubes for Semiconductor Metrology

{
  "title_en": "Conductive Carbon Nanotubes for Semiconductor Metrology",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2010-08-10",
  "date_original": "August 10, 2010",
  "url": "https://www.nist.gov/publications/conductive-carbon-nanotubes-semiconductor-metrology",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Joseph J. Kopanski , Victor H. Vartanian, Vladimir Mancevski, Phillip D. Rack, Ilona Sitnitsky, Matthew D. Bresin",
  "abstract_excerpt_en": "This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were",
  "id": "159e7dcb92473fca8a3c",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Conductive Carbon Nanotubes for Semiconductor Metrology",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2010-08-10",
      "date_original": "August 10, 2010",
      "url": "https://www.nist.gov/publications/conductive-carbon-nanotubes-semiconductor-metrology",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Joseph J. Kopanski , Victor H. Vartanian, Vladimir Mancevski, Phillip D. Rack, Ilona Sitnitsky, Matthew D. Bresin",
      "abstract_excerpt_en": "This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were"
    }
  ],
  "translation_state": "none"
}