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NIST · ИТ · 171a32e06e851fbd8125

171a32e06e851fbd8125 · Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8

Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8

Measurements of ion energy distributions relative ion intensities, and absolute total ion current densities were made at the grounded electrode of an inductively coupled Gaseous Electronics Conference (GEC) radio-frequency reference cell for discharges

Официальный источник · 2000-11-01

Полные импортированные сведения карточки
{
  "title_en": "Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2000-11-01",
  "date_original": "November 1, 2000",
  "url": "https://www.nist.gov/publications/ion-fluxes-and-energies-inductively-coupled-radio-frequency-discharges-containing-c2f6",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Amanda N. Goyettes, Yicheng Wang , Martin Misakian , James K. Olthoff",
  "abstract_excerpt_en": "Measurements of ion energy distributions relative ion intensities, and absolute total ion current densities were made at the grounded electrode of an inductively coupled Gaseous Electronics Conference (GEC) radio-frequency reference cell for discharges",
  "id": "171a32e06e851fbd8125",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Ion fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C2F6 and c-C4F8",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2000-11-01",
      "date_original": "November 1, 2000",
      "url": "https://www.nist.gov/publications/ion-fluxes-and-energies-inductively-coupled-radio-frequency-discharges-containing-c2f6",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Amanda N. Goyettes, Yicheng Wang , Martin Misakian , James K. Olthoff",
      "abstract_excerpt_en": "Measurements of ion energy distributions relative ion intensities, and absolute total ion current densities were made at the grounded electrode of an inductively coupled Gaseous Electronics Conference (GEC) radio-frequency reference cell for discharges"
    }
  ],
  "translation_state": "none"
}