1c20ab9be24c64b1c80d · Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges
In pulse-modulated inductively coupled plasmas generated in CF 4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF 4:50%Ar volume mixture with the peak
{
"title_en": "Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges",
"designation": "",
"series": "",
"status": "",
"date": "2000-03-01",
"date_original": "March 1, 2000",
"url": "https://www.nist.gov/publications/time-resolved-measurements-ion-energy-distributions-and-optical-emissions-pulsed-radio",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , Eric C. Benck , Martin Misakian , M. Edamura, James K. Olthoff",
"abstract_excerpt_en": "In pulse-modulated inductively coupled plasmas generated in CF 4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF 4:50%Ar volume mixture with the peak",
"id": "1c20ab9be24c64b1c80d",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Time-resolved Measurements of Ion Energy Distributions and Optical Emissions in Pulsed Radio-Frequency Discharges",
"designation": "",
"series": "",
"status": "",
"date": "2000-03-01",
"date_original": "March 1, 2000",
"url": "https://www.nist.gov/publications/time-resolved-measurements-ion-energy-distributions-and-optical-emissions-pulsed-radio",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , Eric C. Benck , Martin Misakian , M. Edamura, James K. Olthoff",
"abstract_excerpt_en": "In pulse-modulated inductively coupled plasmas generated in CF 4:Ar mixtures, a transition between a capacitive coupling mode (E mode) and an inductive coupling mode (H mode) was observed. For a pulsed plasma in a 50%CF 4:50%Ar volume mixture with the peak"
}
],
"translation_state": "none"
}