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1e4af067099782e65486 · A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide

A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide

The design, modeling, fabrication, and characterization of a vibrationally trapped thickness-shear MEMS resonator is presented. This device is intended to avoid various limitations of flexural MEMS resonators, including nonlinearity, clamping losses

Официальный источник · 2012-05-21

Полные импортированные сведения карточки
{
  "title_en": "A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2012-05-21",
  "date_original": "May 21, 2012",
  "url": "https://www.nist.gov/publications/thickness-shear-mems-resonator-employing-electromechanical-transduction-through",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Ward L. Johnson , Thomas M. Wallis , Pavel Kabos , Eduard Rocas , Juan C. Collado Gomez , Li-Anne Liew , Albert Davydov , Alivia Plankis, Paul R. Heyliger",
  "abstract_excerpt_en": "The design, modeling, fabrication, and characterization of a vibrationally trapped thickness-shear MEMS resonator is presented. This device is intended to avoid various limitations of flexural MEMS resonators, including nonlinearity, clamping losses",
  "id": "1e4af067099782e65486",
  "sources": [
    "NIST Publications"
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  "source_records": [
    {
      "title_en": "A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2012-05-21",
      "date_original": "May 21, 2012",
      "url": "https://www.nist.gov/publications/thickness-shear-mems-resonator-employing-electromechanical-transduction-through",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Ward L. Johnson , Thomas M. Wallis , Pavel Kabos , Eduard Rocas , Juan C. Collado Gomez , Li-Anne Liew , Albert Davydov , Alivia Plankis, Paul R. Heyliger",
      "abstract_excerpt_en": "The design, modeling, fabrication, and characterization of a vibrationally trapped thickness-shear MEMS resonator is presented. This device is intended to avoid various limitations of flexural MEMS resonators, including nonlinearity, clamping losses"
    }
  ],
  "translation_state": "none"
}