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3042789c80034ce0e46e · Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic

Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic

Официальный источник · 1993-08-01

Полные импортированные сведения карточки
{
  "title_en": "Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1993-08-01",
  "date_original": "August 1, 1993",
  "url": "https://www.nist.gov/publications/characterization-and-calibration-bitrga-use-plasma-processing-diagnostic",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , Richard J. Van Brunt",
  "abstract_excerpt_en": "",
  "id": "3042789c80034ce0e46e",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Characterization and Calibration of a BIT/RGA for Use as a Plasma Processing Diagnostic",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1993-08-01",
      "date_original": "August 1, 1993",
      "url": "https://www.nist.gov/publications/characterization-and-calibration-bitrga-use-plasma-processing-diagnostic",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , Richard J. Van Brunt",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}