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36cf7c03c8934c4d955c · Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach

Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach

Using an elementary kinetic approach, a procedure is described for calculating ion energy distributions (IEDs) from radio frequency (rf) plasmas. The calculated distributions, which are in the form of histograms, are used to fit experimental argon and CF 3

Официальный источник · 2000-04-01

Полные импортированные сведения карточки
{
  "title_en": "Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2000-04-01",
  "date_original": "April 1, 2000",
  "url": "https://www.nist.gov/publications/calculation-ion-energy-distributions-radio-frequency-plasmas-using-simplified-kinetic",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Martin Misakian , Yicheng Wang",
  "abstract_excerpt_en": "Using an elementary kinetic approach, a procedure is described for calculating ion energy distributions (IEDs) from radio frequency (rf) plasmas. The calculated distributions, which are in the form of histograms, are used to fit experimental argon and CF 3",
  "id": "36cf7c03c8934c4d955c",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Calculation of Ion Energy Distributions from Radio Frequency Plasmas Using a Simplified Kinetic Approach",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2000-04-01",
      "date_original": "April 1, 2000",
      "url": "https://www.nist.gov/publications/calculation-ion-energy-distributions-radio-frequency-plasmas-using-simplified-kinetic",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Martin Misakian , Yicheng Wang",
      "abstract_excerpt_en": "Using an elementary kinetic approach, a procedure is described for calculating ion energy distributions (IEDs) from radio frequency (rf) plasmas. The calculated distributions, which are in the form of histograms, are used to fit experimental argon and CF 3"
    }
  ],
  "translation_state": "none"
}