⌕ Поиск по атласу

NIST · ИТ · 4b4d55e8524e02a38529

4b4d55e8524e02a38529 · Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures

Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures

Официальный источник · 1994-03-01

Полные импортированные сведения карточки
{
  "title_en": "Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1994-03-01",
  "date_original": "March 1, 1994",
  "url": "https://www.nist.gov/publications/use-ion-energy-analyzer-mass-spectrometer-measure-ion-kinetic-energy-distributions-rf",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov, J. A. Rees",
  "abstract_excerpt_en": "",
  "id": "4b4d55e8524e02a38529",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1994-03-01",
      "date_original": "March 1, 1994",
      "url": "https://www.nist.gov/publications/use-ion-energy-analyzer-mass-spectrometer-measure-ion-kinetic-energy-distributions-rf",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov, J. A. Rees",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}