542e8909090139cfb4f6 · Mass-resolved Studies of Positive Ions in High Density Plasmas Generated in CHF3, C2F6, and CH2FCF3 and Their Mixtures with Ar

{
  "title_en": "Mass-resolved Studies of Positive Ions in High Density Plasmas Generated in CHF3, C2F6, and CH2FCF3 and Their Mixtures with Ar",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2000-09-01",
  "date_original": "September 1, 2000",
  "url": "https://www.nist.gov/publications/mass-resolved-studies-positive-ions-high-density-plasmas-generated-chf3-c2f6-and",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Yicheng Wang , Amanda N. Goyettes, Martin Misakian , James K. Olthoff",
  "abstract_excerpt_en": "We have determined the relative abundances and energy distributions of positive ions in high density plasmas generated in CHF 3, C 2F 6 and CH 2FCF 3 and their mixtures with Ar using an ion energy analyzer-mass spectrometer appended to the lower electrode",
  "id": "542e8909090139cfb4f6",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Mass-resolved Studies of Positive Ions in High Density Plasmas Generated in CHF3, C2F6, and CH2FCF3 and Their Mixtures with Ar",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2000-09-01",
      "date_original": "September 1, 2000",
      "url": "https://www.nist.gov/publications/mass-resolved-studies-positive-ions-high-density-plasmas-generated-chf3-c2f6-and",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Yicheng Wang , Amanda N. Goyettes, Martin Misakian , James K. Olthoff",
      "abstract_excerpt_en": "We have determined the relative abundances and energy distributions of positive ions in high density plasmas generated in CHF 3, C 2F 6 and CH 2FCF 3 and their mixtures with Ar using an ion energy analyzer-mass spectrometer appended to the lower electrode"
    }
  ],
  "translation_state": "none"
}