NIST · ИТ · 546ce74e31fb01ccb01c
Silicon Micromachines for Fun and Profit
Over the last decade or so a group of us, while working at Bell Labs, have been able to develop a large number of silicon micromachines for a wide range of applications. In this article, which is part of a special volume to celebrate the career of
NIST · ИТОфициальный источник · 2012-12-12
{
"title_en": "Silicon Micromachines for Fun and Profit",
"designation": "",
"series": "",
"status": "",
"date": "2012-12-12",
"date_original": "December 12, 2012",
"url": "https://www.nist.gov/publications/silicon-micromachines-fun-and-profit",
"source": "NIST Publications",
"display_en": "",
"authors_en": "David Bishop, Flavio Pardo, Cris Bolle, Randy Giles, Vladimir Aksyuk",
"abstract_excerpt_en": "Over the last decade or so a group of us, while working at Bell Labs, have been able to develop a large number of silicon micromachines for a wide range of applications. In this article, which is part of a special volume to celebrate the career of",
"id": "546ce74e31fb01ccb01c",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Silicon Micromachines for Fun and Profit",
"designation": "",
"series": "",
"status": "",
"date": "2012-12-12",
"date_original": "December 12, 2012",
"url": "https://www.nist.gov/publications/silicon-micromachines-fun-and-profit",
"source": "NIST Publications",
"display_en": "",
"authors_en": "David Bishop, Flavio Pardo, Cris Bolle, Randy Giles, Vladimir Aksyuk",
"abstract_excerpt_en": "Over the last decade or so a group of us, while working at Bell Labs, have been able to develop a large number of silicon micromachines for a wide range of applications. In this article, which is part of a special volume to celebrate the career of"
}
],
"translation_state": "none"
}