57d43bc53a51e1933995 · Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures
We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively-coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon
{
"title_en": "Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures",
"designation": "",
"series": "",
"status": "",
"date": "1999-05-01",
"date_original": "May 1, 1999",
"url": "https://www.nist.gov/publications/ion-energy-distributions-inductively-coupled-radio-frequency-discharges-argon-nitrogen",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , James K. Olthoff",
"abstract_excerpt_en": "We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively-coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon",
"id": "57d43bc53a51e1933995",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Ion Energy Distributions in Inductively Coupled Radio-Frequency Discharges in Argon, Nitrogen, Oxygen, Chlorine, and Their Mixtures",
"designation": "",
"series": "",
"status": "",
"date": "1999-05-01",
"date_original": "May 1, 1999",
"url": "https://www.nist.gov/publications/ion-energy-distributions-inductively-coupled-radio-frequency-discharges-argon-nitrogen",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , James K. Olthoff",
"abstract_excerpt_en": "We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively-coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure argon"
}
],
"translation_state": "none"
}