NIST · ИТ · 5907a6d0c154956705a0
Impact of Thermal Stability of Isolation Liner on the Electrical Characteristics of TSVs
This study is focused on understanding the effect of thermal cycling on the signal integrity characteristics of TSV isolation liner (SiO2). The use of radio frequency (RF) signals is found to be a good metrology tool for the detection of discontinuities in
NIST · ИТОфициальный источник · 2013-07-30
{
"title_en": "Impact of Thermal Stability of Isolation Liner on the Electrical Characteristics of TSVs",
"designation": "",
"series": "",
"status": "",
"date": "2013-07-30",
"date_original": "July 30, 2013",
"url": "https://www.nist.gov/publications/impact-thermal-stability-isolation-liner-electrical-characteristics-tsvs",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Chukwudi A. Okoro , Yaw S. Obeng",
"abstract_excerpt_en": "This study is focused on understanding the effect of thermal cycling on the signal integrity characteristics of TSV isolation liner (SiO2). The use of radio frequency (RF) signals is found to be a good metrology tool for the detection of discontinuities in",
"id": "5907a6d0c154956705a0",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Impact of Thermal Stability of Isolation Liner on the Electrical Characteristics of TSVs",
"designation": "",
"series": "",
"status": "",
"date": "2013-07-30",
"date_original": "July 30, 2013",
"url": "https://www.nist.gov/publications/impact-thermal-stability-isolation-liner-electrical-characteristics-tsvs",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Chukwudi A. Okoro , Yaw S. Obeng",
"abstract_excerpt_en": "This study is focused on understanding the effect of thermal cycling on the signal integrity characteristics of TSV isolation liner (SiO2). The use of radio frequency (RF) signals is found to be a good metrology tool for the detection of discontinuities in"
}
],
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}