5d627344bf6a149e82d9 · Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas

{
  "title_en": "Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1991-07-01",
  "date_original": "July 1, 1991",
  "url": "https://www.nist.gov/publications/axis-measurements-ion-kinetic-energies-rf-plasmas",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "S. B. Radovanov, James K. Olthoff , Richard J. Van Brunt",
  "abstract_excerpt_en": "",
  "id": "5d627344bf6a149e82d9",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1991-07-01",
      "date_original": "July 1, 1991",
      "url": "https://www.nist.gov/publications/axis-measurements-ion-kinetic-energies-rf-plasmas",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "S. B. Radovanov, James K. Olthoff , Richard J. Van Brunt",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}