66e322adb008705ab1dc · Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C 2 F 6 and c-C 4 F 8
Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C 2 F 6 and c-C 4 F 8
We report ion energy distributions (IEDs), relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency (rf) reference cell for discharges generated in
{
"title_en": "Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C 2 F 6 and c-C 4 F 8",
"designation": "",
"series": "",
"status": "",
"date": "2000-11-01",
"date_original": "November 1, 2000",
"url": "https://www.nist.gov/publications/ion-fluxes-and-energies-inductively-coupled-radio-frequency-discharges-containing-0",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , Martin Misakian , Amanda N. Goyettes, James K. Olthoff",
"abstract_excerpt_en": "We report ion energy distributions (IEDs), relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency (rf) reference cell for discharges generated in",
"id": "66e322adb008705ab1dc",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Ion Fluxes and Energies in Inductively Coupled Radio-Frequency Discharges Containing C 2 F 6 and c-C 4 F 8",
"designation": "",
"series": "",
"status": "",
"date": "2000-11-01",
"date_original": "November 1, 2000",
"url": "https://www.nist.gov/publications/ion-fluxes-and-energies-inductively-coupled-radio-frequency-discharges-containing-0",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Yicheng Wang , Martin Misakian , Amanda N. Goyettes, James K. Olthoff",
"abstract_excerpt_en": "We report ion energy distributions (IEDs), relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency (rf) reference cell for discharges generated in"
}
],
"translation_state": "none"
}