683e5767c5cfcb893d09 · Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges
Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges
Positive ion bombardment plays an essential role in plasma processing, influencing etch rates, materials selectivity and etching profiles. Experimental determination of ion identities and energies in processing plasmas provides complementary data necessary
{
"title_en": "Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges",
"designation": "",
"series": "",
"status": "",
"date": "2001-01-01",
"date_original": "January 1, 2001",
"url": "https://www.nist.gov/publications/comparison-identities-fluxes-and-energies-ions-formed-high-density-fluorocarbon",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Amanda N. Goyettes, Yicheng Wang , James K. Olthoff",
"abstract_excerpt_en": "Positive ion bombardment plays an essential role in plasma processing, influencing etch rates, materials selectivity and etching profiles. Experimental determination of ion identities and energies in processing plasmas provides complementary data necessary",
"id": "683e5767c5cfcb893d09",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Comparison of the Identities, Fluxes, and Energies of Ions Formed in High Density Fluorocarbon Discharges",
"designation": "",
"series": "",
"status": "",
"date": "2001-01-01",
"date_original": "January 1, 2001",
"url": "https://www.nist.gov/publications/comparison-identities-fluxes-and-energies-ions-formed-high-density-fluorocarbon",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Amanda N. Goyettes, Yicheng Wang , James K. Olthoff",
"abstract_excerpt_en": "Positive ion bombardment plays an essential role in plasma processing, influencing etch rates, materials selectivity and etching profiles. Experimental determination of ion identities and energies in processing plasmas provides complementary data necessary"
}
],
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}