6fe23b069c31818ed773 · Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas
Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas
This article reports the results of time-resolved measurements of ion energy distributions (IEDs), relative ion densities, as well as optical emissions and electrical characteristics in pulsed, inductively coupled plasmas for the simple gas mixture of
{
"title_en": "Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas",
"designation": "",
"series": "",
"status": "",
"date": "2000-10-01",
"date_original": "October 1, 2000",
"url": "https://www.nist.gov/publications/time-evolution-ion-energy-distributions-and-optical-emission-pulsed-inductively-coupled",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Martin Misakian , Eric C. Benck , Yicheng Wang",
"abstract_excerpt_en": "This article reports the results of time-resolved measurements of ion energy distributions (IEDs), relative ion densities, as well as optical emissions and electrical characteristics in pulsed, inductively coupled plasmas for the simple gas mixture of",
"id": "6fe23b069c31818ed773",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas",
"designation": "",
"series": "",
"status": "",
"date": "2000-10-01",
"date_original": "October 1, 2000",
"url": "https://www.nist.gov/publications/time-evolution-ion-energy-distributions-and-optical-emission-pulsed-inductively-coupled",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Martin Misakian , Eric C. Benck , Yicheng Wang",
"abstract_excerpt_en": "This article reports the results of time-resolved measurements of ion energy distributions (IEDs), relative ion densities, as well as optical emissions and electrical characteristics in pulsed, inductively coupled plasmas for the simple gas mixture of"
}
],
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}