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74035a74e889b6bf68f1 · Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors

Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors

Официальный источник · 1992-02-01

Полные импортированные сведения карточки
{
  "title_en": "Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1992-02-01",
  "date_original": "February 1, 1992",
  "url": "https://www.nist.gov/publications/mass-spectromic-and-optical-emission-diagnostics-rf-plasma-reactors",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , J R. Roberts , Richard J. Van Brunt , James Whetstone , Mark A. Sobolewski , S. Djurovic",
  "abstract_excerpt_en": "",
  "id": "74035a74e889b6bf68f1",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1992-02-01",
      "date_original": "February 1, 1992",
      "url": "https://www.nist.gov/publications/mass-spectromic-and-optical-emission-diagnostics-rf-plasma-reactors",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , J R. Roberts , Richard J. Van Brunt , James Whetstone , Mark A. Sobolewski , S. Djurovic",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}