79ece2824d57e6725ba9 · A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing
A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing
Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time
{
"title_en": "A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing",
"designation": "",
"series": "",
"status": "",
"date": "2009-09-28",
"date_original": "September 28, 2009",
"url": "https://www.nist.gov/publications/time-synchronization-testbed-define-and-standardize-real-time-model-based-control",
"source": "NIST Publications",
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"authors_en": "Deepak Sharma, Dhananjay Anand, Ya-Shian Li-Baboud , James Moyne",
"abstract_excerpt_en": "Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time",
"id": "79ece2824d57e6725ba9",
"sources": [
"NIST Publications"
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{
"title_en": "A Time Synchronization Testbed to Define and Standardize Real-Time Model-Based Control Capabilities in Semiconductor Manufacturing",
"designation": "",
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"date": "2009-09-28",
"date_original": "September 28, 2009",
"url": "https://www.nist.gov/publications/time-synchronization-testbed-define-and-standardize-real-time-model-based-control",
"source": "NIST Publications",
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"authors_en": "Deepak Sharma, Dhananjay Anand, Ya-Shian Li-Baboud , James Moyne",
"abstract_excerpt_en": "Shrinking process tolerances due to decreasing device sizes and increasing chip complexity in semiconductor manufacturing are motivating efforts to improve methods for real-time networked process control. Prior work shows that the lack of precise time"
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