NIST · ИТ · 7c9b2812b7916c6b8c7b
Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In
NIST · ИТОфициальный источник · 2009-07-15
{
"title_en": "Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope",
"designation": "",
"series": "",
"status": "",
"date": "2009-07-15",
"date_original": "July 15, 2009",
"url": "https://www.nist.gov/publications/nanoscale-measurements-through-focus-scanning-optical-microscope",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Ravikiran Attota , Richard M. Silver , Thomas A. Germer",
"abstract_excerpt_en": "We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In",
"id": "7c9b2812b7916c6b8c7b",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope",
"designation": "",
"series": "",
"status": "",
"date": "2009-07-15",
"date_original": "July 15, 2009",
"url": "https://www.nist.gov/publications/nanoscale-measurements-through-focus-scanning-optical-microscope",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Ravikiran Attota , Richard M. Silver , Thomas A. Germer",
"abstract_excerpt_en": "We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In"
}
],
"translation_state": "none"
}