8460a725ad9eca759b18 · Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges

{
  "title_en": "Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1996-08-01",
  "date_original": "August 1, 1996",
  "url": "https://www.nist.gov/publications/optical-and-mass-spectrometric-investigations-ions-and-neutral-species-sf6-radio",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "R Foest, James K. Olthoff , Richard J. Van Brunt , Eric C. Benck , J R. Roberts",
  "abstract_excerpt_en": "",
  "id": "8460a725ad9eca759b18",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1996-08-01",
      "date_original": "August 1, 1996",
      "url": "https://www.nist.gov/publications/optical-and-mass-spectrometric-investigations-ions-and-neutral-species-sf6-radio",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "R Foest, James K. Olthoff , Richard J. Van Brunt , Eric C. Benck , J R. Roberts",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}