8c829cef08f7317a6fc8 · Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges

{
  "title_en": "Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1996-01-01",
  "date_original": "January 1, 1996",
  "url": "https://www.nist.gov/publications/evidence-inelastic-processes-n3-and-n4-ion-energy-distributions-hen2-radio-frequency",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "H. H. Hwang, James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov, Mark J. Kushner",
  "abstract_excerpt_en": "",
  "id": "8c829cef08f7317a6fc8",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1996-01-01",
      "date_original": "January 1, 1996",
      "url": "https://www.nist.gov/publications/evidence-inelastic-processes-n3-and-n4-ion-energy-distributions-hen2-radio-frequency",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "H. H. Hwang, James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov, Mark J. Kushner",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}