NIST · ИТ · 9c6f363e9b9ff26d9d42
Electron Collision Cross Sections Derived from Critically Assessed Data
Electron-molecule collisions are among the most fundamental processes in gas discharges. They are also the precursors of the ions and the radicals which drive the etch, cleaning, or deposition processes in plasma reactors. Hence, there is a need for a
NIST · ИТОфициальный источник · 1999-07-01
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"title_en": "Electron Collision Cross Sections Derived from Critically Assessed Data",
"designation": "",
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"date": "1999-07-01",
"date_original": "July 1, 1999",
"url": "https://www.nist.gov/publications/electron-collision-cross-sections-derived-critically-assessed-data",
"source": "NIST Publications",
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"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "Electron-molecule collisions are among the most fundamental processes in gas discharges. They are also the precursors of the ions and the radicals which drive the etch, cleaning, or deposition processes in plasma reactors. Hence, there is a need for a",
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{
"title_en": "Electron Collision Cross Sections Derived from Critically Assessed Data",
"designation": "",
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"date": "1999-07-01",
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"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "Electron-molecule collisions are among the most fundamental processes in gas discharges. They are also the precursors of the ions and the radicals which drive the etch, cleaning, or deposition processes in plasma reactors. Hence, there is a need for a"
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