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9eb3f082f7b8f54240ca · Studies of Ion Bombardment in High Density Plasmas Containing CF 4

Studies of Ion Bombardment in High Density Plasmas Containing CF 4

We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure C 4

Официальный источник · 1999-07-01

Полные импортированные сведения карточки
{
  "title_en": "Studies of Ion Bombardment in High Density Plasmas Containing CF 4",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1999-07-01",
  "date_original": "July 1, 1999",
  "url": "https://www.nist.gov/publications/studies-ion-bombardment-high-density-plasmas-containing-cf4",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , Yicheng Wang",
  "abstract_excerpt_en": "We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure C 4",
  "id": "9eb3f082f7b8f54240ca",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Studies of Ion Bombardment in High Density Plasmas Containing CF 4",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1999-07-01",
      "date_original": "July 1, 1999",
      "url": "https://www.nist.gov/publications/studies-ion-bombardment-high-density-plasmas-containing-cf4",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , Yicheng Wang",
      "abstract_excerpt_en": "We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively coupled Gaseous Electronics Conference radio-frequency reference cell for discharges generated in pure C 4"
    }
  ],
  "translation_state": "none"
}