a19162bce8631cdba637 · Electron Interactions with CF 3 I

{
  "title_en": "Electron Interactions with CF 3 I",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2000-01-01",
  "date_original": "January 1, 2000",
  "url": "https://www.nist.gov/publications/electron-interactions-cf3i",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Loucas G. Christophorou, James K. Olthoff",
  "abstract_excerpt_en": "Low-energy electron collision data for the plasma processing gas CF 3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These",
  "id": "a19162bce8631cdba637",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Electron Interactions with CF 3 I",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2000-01-01",
      "date_original": "January 1, 2000",
      "url": "https://www.nist.gov/publications/electron-interactions-cf3i",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Loucas G. Christophorou, James K. Olthoff",
      "abstract_excerpt_en": "Low-energy electron collision data for the plasma processing gas CF 3I are sparse. Limited cross section data are available only for total and differential elastic electron scattering, electron-impact ionization, and electron attachment processes. These"
    }
  ],
  "translation_state": "none"
}