a799dd53132aa766b559 · Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments
Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments
We have developed a method to examine how residual stress affects the values of the elastic moduli of thin films determined from surface acoustic wave spectroscopy experiments. Because the effective second-order elastic moduli in the stressed state are a
{
"title_en": "Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments",
"designation": "",
"series": "",
"status": "",
"date": "2005-02-23",
"date_original": "February 23, 2005",
"url": "https://www.nist.gov/publications/effects-residual-stress-thin-film-elastic-moduli-calculated-surface-acoustic-wave",
"source": "NIST Publications",
"display_en": "",
"authors_en": "R E. Kumon, Donna C. Hurley",
"abstract_excerpt_en": "We have developed a method to examine how residual stress affects the values of the elastic moduli of thin films determined from surface acoustic wave spectroscopy experiments. Because the effective second-order elastic moduli in the stressed state are a",
"id": "a799dd53132aa766b559",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments",
"designation": "",
"series": "",
"status": "",
"date": "2005-02-23",
"date_original": "February 23, 2005",
"url": "https://www.nist.gov/publications/effects-residual-stress-thin-film-elastic-moduli-calculated-surface-acoustic-wave",
"source": "NIST Publications",
"display_en": "",
"authors_en": "R E. Kumon, Donna C. Hurley",
"abstract_excerpt_en": "We have developed a method to examine how residual stress affects the values of the elastic moduli of thin films determined from surface acoustic wave spectroscopy experiments. Because the effective second-order elastic moduli in the stressed state are a"
}
],
"translation_state": "none"
}