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ac25f954f6b8b571c740 · Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6

Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6

Официальный источник · 2001-07-01

Полные импортированные сведения карточки
{
  "title_en": "Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2001-07-01",
  "date_original": "July 1, 2001",
  "url": "https://www.nist.gov/publications/ion-compositions-and-energies-inductively-coupled-plasmas-containing-sf6",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Amanda N. Goyettes, Yicheng Wang , James K. Olthoff",
  "abstract_excerpt_en": "",
  "id": "ac25f954f6b8b571c740",
  "sources": [
    "NIST Publications"
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  "source_records": [
    {
      "title_en": "Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2001-07-01",
      "date_original": "July 1, 2001",
      "url": "https://www.nist.gov/publications/ion-compositions-and-energies-inductively-coupled-plasmas-containing-sf6",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Amanda N. Goyettes, Yicheng Wang , James K. Olthoff",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}