NIST · ИТ · b2cfcf19e054d2fcef76
Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions
NIST · ИТОфициальный источник · 2013-09-05
{
"title_en": "Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction",
"designation": "",
"series": "",
"status": "",
"date": "2013-09-05",
"date_original": "September 5, 2013",
"url": "https://www.nist.gov/publications/fourier-domain-optical-tool-normalization-quantitative-parametric-image-reconstruction",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Jing Qin , Richard M. Silver , Bryan M. Barnes , Hui Zhou , Francois R. Goasmat",
"abstract_excerpt_en": "There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions",
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"title_en": "Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction",
"designation": "",
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"date": "2013-09-05",
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"url": "https://www.nist.gov/publications/fourier-domain-optical-tool-normalization-quantitative-parametric-image-reconstruction",
"source": "NIST Publications",
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"authors_en": "Jing Qin , Richard M. Silver , Bryan M. Barnes , Hui Zhou , Francois R. Goasmat",
"abstract_excerpt_en": "There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions"
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