⌕ Поиск по атласу

NIST · ИТ · b52f11e4af9c9d21f6e2

b52f11e4af9c9d21f6e2 · Electron Interactions with Plasma Processing Gases

Electron Interactions with Plasma Processing Gases

Официальный источник · 1998-08-01

Полные импортированные сведения карточки
{
  "title_en": "Electron Interactions with Plasma Processing Gases",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1998-08-01",
  "date_original": "August 1, 1998",
  "url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Loucas G. Christophorou, James K. Olthoff",
  "abstract_excerpt_en": "",
  "id": "b52f11e4af9c9d21f6e2",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Electron Interactions with Plasma Processing Gases",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1998-08-01",
      "date_original": "August 1, 1998",
      "url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Loucas G. Christophorou, James K. Olthoff",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}