bdc9f3d60599312089f6 · Mems-Based Embedded Sensor Virtual Components for SOC

{
  "title_en": "Mems-Based Embedded Sensor Virtual Components for SOC",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2004-06-24",
  "date_original": "June 24, 2004",
  "url": "https://www.nist.gov/publications/mems-based-embedded-sensor-virtual-components-soc",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Muhammad Afridi , Allen R. Hefner Jr. , David W. Berning , Colleen E. Hood , Ankush Varma , Bruce Jacob, Stephen Semancik",
  "abstract_excerpt_en": "The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the",
  "id": "bdc9f3d60599312089f6",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Mems-Based Embedded Sensor Virtual Components for SOC",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2004-06-24",
      "date_original": "June 24, 2004",
      "url": "https://www.nist.gov/publications/mems-based-embedded-sensor-virtual-components-soc",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Muhammad Afridi , Allen R. Hefner Jr. , David W. Berning , Colleen E. Hood , Ankush Varma , Bruce Jacob, Stephen Semancik",
      "abstract_excerpt_en": "The design and implementation of a monolithic MEMS-based (Micro Electro Mechanical Systems) gas sensor virtual component is described. A bulk micromachining technique is used to create suspended microhotplate structures. The thermal properties of the"
    }
  ],
  "translation_state": "none"
}