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be8b803dc2a54ddd2daa · Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges

Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges

Официальный источник · 1995-07-01

Полные импортированные сведения карточки
{
  "title_en": "Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1995-07-01",
  "date_original": "July 1, 1995",
  "url": "https://www.nist.gov/publications/effect-electrode-material-measured-ion-energy-distributions-radio-frequency-discharges",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov",
  "abstract_excerpt_en": "",
  "id": "be8b803dc2a54ddd2daa",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1995-07-01",
      "date_original": "July 1, 1995",
      "url": "https://www.nist.gov/publications/effect-electrode-material-measured-ion-energy-distributions-radio-frequency-discharges",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , Richard J. Van Brunt , S. B. Radovanov",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}