ce3c0ddfb7262bc64b0b · The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges

{
  "title_en": "The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1994-01-01",
  "date_original": "January 1, 1994",
  "url": "https://www.nist.gov/publications/gaseous-electronics-conference-radio-frequency-reference-cell-defined-parallel-plate",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "J R. Roberts , James K. Olthoff , James Whetstone , Richard J. Van Brunt , Mark A. Sobolewski",
  "abstract_excerpt_en": "",
  "id": "ce3c0ddfb7262bc64b0b",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1994-01-01",
      "date_original": "January 1, 1994",
      "url": "https://www.nist.gov/publications/gaseous-electronics-conference-radio-frequency-reference-cell-defined-parallel-plate",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "J R. Roberts , James K. Olthoff , James Whetstone , Richard J. Van Brunt , Mark A. Sobolewski",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}