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d2b2089b85db9f1f3054 · Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges

Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges

Официальный источник · 1992-09-01

Полные импортированные сведения карточки
{
  "title_en": "Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1992-09-01",
  "date_original": "September 1, 1992",
  "url": "https://www.nist.gov/publications/ion-kinetic-energy-distributions-and-electrical-measurements-aro2-rf-glow-discharges",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "James K. Olthoff , Richard J. Van Brunt , Mark A. Sobolewski",
  "abstract_excerpt_en": "",
  "id": "d2b2089b85db9f1f3054",
  "sources": [
    "NIST Publications"
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  "source_records": [
    {
      "title_en": "Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1992-09-01",
      "date_original": "September 1, 1992",
      "url": "https://www.nist.gov/publications/ion-kinetic-energy-distributions-and-electrical-measurements-aro2-rf-glow-discharges",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "James K. Olthoff , Richard J. Van Brunt , Mark A. Sobolewski",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}