NIST · ИТ · d45bef2b2d1138741937
Applications of Electron-Interaction Reference Data to the Semiconductor Industry
Many advanced plasma diagnostic techniques and plasma models require fundamental physical data in order to make accurate measurements or predictions. Fundamental electron-interaction data are among the most critical since electron collisions are the
NIST · ИТОфициальный источник · 1998-12-01
{
"title_en": "Applications of Electron-Interaction Reference Data to the Semiconductor Industry",
"designation": "",
"series": "",
"status": "",
"date": "1998-12-01",
"date_original": "December 1, 1998",
"url": "https://www.nist.gov/publications/applications-electron-interaction-reference-data-semiconductor-industry",
"source": "NIST Publications",
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"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "Many advanced plasma diagnostic techniques and plasma models require fundamental physical data in order to make accurate measurements or predictions. Fundamental electron-interaction data are among the most critical since electron collisions are the",
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{
"title_en": "Applications of Electron-Interaction Reference Data to the Semiconductor Industry",
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"url": "https://www.nist.gov/publications/applications-electron-interaction-reference-data-semiconductor-industry",
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"authors_en": "Loucas G. Christophorou, James K. Olthoff",
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