db41ac7bcd5ab862e352 · Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System

{
  "title_en": "Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System",
  "designation": "",
  "series": "",
  "status": "",
  "date": "2002-03-01",
  "date_original": "March 1, 2002",
  "url": "https://www.nist.gov/publications/transient-heating-study-microhotplates-using-high-speed-thermal-imaging-system",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Muhammad Afridi , David W. Berning , Allen R. Hefner Jr. , John S. Suehle , Mona E. Zaghloul , Eric Kelley, Zharadeen R. Parrilla, Colleen E. Hood",
  "abstract_excerpt_en": "A high-speed thermal imaging system is used to investigate the dynamic thermal behavior of MEMS-based (MicroElectroMechanical Systems) microhotplate devices. These devices are suspended microstructures fabricated in CMOS technology and are used in various",
  "id": "db41ac7bcd5ab862e352",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Transient Heating Study of Microhotplates by Using a High-Speed Thermal Imaging System",
      "designation": "",
      "series": "",
      "status": "",
      "date": "2002-03-01",
      "date_original": "March 1, 2002",
      "url": "https://www.nist.gov/publications/transient-heating-study-microhotplates-using-high-speed-thermal-imaging-system",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Muhammad Afridi , David W. Berning , Allen R. Hefner Jr. , John S. Suehle , Mona E. Zaghloul , Eric Kelley, Zharadeen R. Parrilla, Colleen E. Hood",
      "abstract_excerpt_en": "A high-speed thermal imaging system is used to investigate the dynamic thermal behavior of MEMS-based (MicroElectroMechanical Systems) microhotplate devices. These devices are suspended microstructures fabricated in CMOS technology and are used in various"
    }
  ],
  "translation_state": "none"
}