NIST · ИТ · e96ffb0da7f87e20158e
Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature
In this paper, we report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated
NIST · ИТОфициальный источник · 2005-10-05
{
"title_en": "Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature",
"designation": "",
"series": "",
"status": "",
"date": "2005-10-05",
"date_original": "October 5, 2005",
"url": "https://www.nist.gov/publications/novel-fabrication-micromechanical-oscillators-nanoscale-sensitivity-room-temperature",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Michelle Chabot, John M. Moreland , Lan Gao, Sy-Hwang Liou, C. W. Miller",
"abstract_excerpt_en": "In this paper, we report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated",
"id": "e96ffb0da7f87e20158e",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature",
"designation": "",
"series": "",
"status": "",
"date": "2005-10-05",
"date_original": "October 5, 2005",
"url": "https://www.nist.gov/publications/novel-fabrication-micromechanical-oscillators-nanoscale-sensitivity-room-temperature",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Michelle Chabot, John M. Moreland , Lan Gao, Sy-Hwang Liou, C. W. Miller",
"abstract_excerpt_en": "In this paper, we report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated"
}
],
"translation_state": "none"
}