ef1e1ab1e97e331f1b0f · Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges

{
  "title_en": "Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1995-08-01",
  "date_original": "August 1, 1995",
  "url": "https://www.nist.gov/publications/influence-electrode-material-measured-ion-kinetic-energy-distributions-radio-frequency",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Richard J. Van Brunt , James K. Olthoff , S. B. Radovanov",
  "abstract_excerpt_en": "",
  "id": "ef1e1ab1e97e331f1b0f",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Influence of Electrode Material on Measured Ion Kinetic-Energy Distributions in Radio-Frequency Discharges",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1995-08-01",
      "date_original": "August 1, 1995",
      "url": "https://www.nist.gov/publications/influence-electrode-material-measured-ion-kinetic-energy-distributions-radio-frequency",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Richard J. Van Brunt , James K. Olthoff , S. B. Radovanov",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}