NIST · ИТ · f01a1e8d591cf74cf5e8
Electron Interactions with c-C 4 F 8
The limited electron collision cross-section and transport-coefficient data for the plasma processing gas perfluorocyclobutane (c-C 4F 8) are synthesized, assessed, and discussed. These include cross sections for total electron scattering, differential
NIST · ИТОфициальный источник · 2001-01-01
{
"title_en": "Electron Interactions with c-C 4 F 8",
"designation": "",
"series": "",
"status": "",
"date": "2001-01-01",
"date_original": "January 1, 2001",
"url": "https://www.nist.gov/publications/electron-interactions-c-c4f8-0",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "The limited electron collision cross-section and transport-coefficient data for the plasma processing gas perfluorocyclobutane (c-C 4F 8) are synthesized, assessed, and discussed. These include cross sections for total electron scattering, differential",
"id": "f01a1e8d591cf74cf5e8",
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{
"title_en": "Electron Interactions with c-C 4 F 8",
"designation": "",
"series": "",
"status": "",
"date": "2001-01-01",
"date_original": "January 1, 2001",
"url": "https://www.nist.gov/publications/electron-interactions-c-c4f8-0",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "The limited electron collision cross-section and transport-coefficient data for the plasma processing gas perfluorocyclobutane (c-C 4F 8) are synthesized, assessed, and discussed. These include cross sections for total electron scattering, differential"
}
],
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}