f2ab049d07f2089bbcc7 · Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry
Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry
In this report, we use vacuum ultraviolet spectroscopic ellipsometry (VUV-SE) to determine the optical as well as structural properties of high-k metal oxides, in particular, of Hafnium Aluminates and Titanium Aluminates. Two sets of samples consisting of
{
"title_en": "Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry",
"designation": "",
"series": "",
"status": "",
"date": "2003-09-30",
"date_original": "September 30, 2003",
"url": "https://www.nist.gov/publications/optical-properties-jet-vapor-deposited-tialo-and-hfalo-determined-vacuum-utraviolet",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Nhan Van Nguyen , Jin-Ping Han , Yong Jai Cho, Wenjuan Zhu, Zhijiong Luo, T P. Ma",
"abstract_excerpt_en": "In this report, we use vacuum ultraviolet spectroscopic ellipsometry (VUV-SE) to determine the optical as well as structural properties of high-k metal oxides, in particular, of Hafnium Aluminates and Titanium Aluminates. Two sets of samples consisting of",
"id": "f2ab049d07f2089bbcc7",
"sources": [
"NIST Publications"
],
"source_records": [
{
"title_en": "Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry",
"designation": "",
"series": "",
"status": "",
"date": "2003-09-30",
"date_original": "September 30, 2003",
"url": "https://www.nist.gov/publications/optical-properties-jet-vapor-deposited-tialo-and-hfalo-determined-vacuum-utraviolet",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Nhan Van Nguyen , Jin-Ping Han , Yong Jai Cho, Wenjuan Zhu, Zhijiong Luo, T P. Ma",
"abstract_excerpt_en": "In this report, we use vacuum ultraviolet spectroscopic ellipsometry (VUV-SE) to determine the optical as well as structural properties of high-k metal oxides, in particular, of Hafnium Aluminates and Titanium Aluminates. Two sets of samples consisting of"
}
],
"translation_state": "none"
}