NIST · ИТ · f94061007017bd3e527a
Electron Interactions With Plasma Processing Gases: CF 4 , CHF 3 , C 2 F 6 , and C 3 F 8
A review of our efforts to evaluate and assess electron interaction data for the plasma processing community is presented. Specifically we present in this paper our recommended electron-interaction cross sections for CF 4, CHF 3, C 2F 6, and C 3F 8.
NIST · ИТОфициальный источник · 1998-01-01
{
"title_en": "Electron Interactions With Plasma Processing Gases: CF 4 , CHF 3 , C 2 F 6 , and C 3 F 8",
"designation": "",
"series": "",
"status": "",
"date": "1998-01-01",
"date_original": "January 1, 1998",
"url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases-cf4-chf3-c2f6-and-c3f8",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "A review of our efforts to evaluate and assess electron interaction data for the plasma processing community is presented. Specifically we present in this paper our recommended electron-interaction cross sections for CF 4, CHF 3, C 2F 6, and C 3F 8.",
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"source_records": [
{
"title_en": "Electron Interactions With Plasma Processing Gases: CF 4 , CHF 3 , C 2 F 6 , and C 3 F 8",
"designation": "",
"series": "",
"status": "",
"date": "1998-01-01",
"date_original": "January 1, 1998",
"url": "https://www.nist.gov/publications/electron-interactions-plasma-processing-gases-cf4-chf3-c2f6-and-c3f8",
"source": "NIST Publications",
"display_en": "",
"authors_en": "Loucas G. Christophorou, James K. Olthoff",
"abstract_excerpt_en": "A review of our efforts to evaluate and assess electron interaction data for the plasma processing community is presented. Specifically we present in this paper our recommended electron-interaction cross sections for CF 4, CHF 3, C 2F 6, and C 3F 8."
}
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}