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fbd68f331b32185dbf0d · Electrical Sensors for Monitoring rf Plasma Sheaths

Electrical Sensors for Monitoring rf Plasma Sheaths

Официальный источник · 1994-05-01

Полные импортированные сведения карточки
{
  "title_en": "Electrical Sensors for Monitoring rf Plasma Sheaths",
  "designation": "",
  "series": "",
  "status": "",
  "date": "1994-05-01",
  "date_original": "May 1, 1994",
  "url": "https://www.nist.gov/publications/electrical-sensors-monitoring-rf-plasma-sheaths",
  "source": "NIST Publications",
  "display_en": "",
  "authors_en": "Mark A. Sobolewski , James K. Olthoff",
  "abstract_excerpt_en": "",
  "id": "fbd68f331b32185dbf0d",
  "sources": [
    "NIST Publications"
  ],
  "source_records": [
    {
      "title_en": "Electrical Sensors for Monitoring rf Plasma Sheaths",
      "designation": "",
      "series": "",
      "status": "",
      "date": "1994-05-01",
      "date_original": "May 1, 1994",
      "url": "https://www.nist.gov/publications/electrical-sensors-monitoring-rf-plasma-sheaths",
      "source": "NIST Publications",
      "display_en": "",
      "authors_en": "Mark A. Sobolewski , James K. Olthoff",
      "abstract_excerpt_en": ""
    }
  ],
  "translation_state": "none"
}